BibTeX record conf/amcc/WangOOC25

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@inproceedings{DBLP:conf/amcc/WangOOC25,
  author       = {Henrik Wang and
                  Feiyang Ou and
                  Gerassimos Orkoulas and
                  Panagiotis D. Christofides},
  title        = {Machine Learning-Based Endpoint-Detection Control System for an Atomic
                  Layer Etching Process},
  booktitle    = {2025 American Control Conference, {ACC} 2025, Denver, CO, USA, July
                  8-10, 2025},
  pages        = {2444--2451},
  publisher    = {{IEEE}},
  year         = {2025},
  url          = {https://doi.org/10.23919/ACC63710.2025.11107967},
  doi          = {10.23919/ACC63710.2025.11107967},
  timestamp    = {Tue, 02 Sep 2025 18:22:23 +0200},
  biburl       = {https://dblp.org/rec/conf/amcc/WangOOC25.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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