BibTeX record conf/mue/Kim13d

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@inproceedings{DBLP:conf/mue/Kim13d,
  author       = {Sang{-}Chul Kim},
  editor       = {James J. Park and
                  Joseph Kee{-}Yin Ng and
                  Hwa{-}Young Jeong and
                  Agustinus Borgy Waluyo},
  title        = {Semiconductor Monitoring System for Etching Process},
  booktitle    = {Multimedia and Ubiquitous Engineering, {MUE} 2013, May 9-11, 2013,
                  Seoul, Korea},
  series       = {Lecture Notes in Electrical Engineering},
  volume       = {240},
  pages        = {1091--1097},
  publisher    = {Springer},
  year         = {2013},
  url          = {https://doi.org/10.1007/978-94-007-6738-6\_134},
  doi          = {10.1007/978-94-007-6738-6\_134},
  timestamp    = {Sat, 11 Jan 2025 00:34:04 +0100},
  biburl       = {https://dblp.org/rec/conf/mue/Kim13d.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}