"Prediction of integral type failures in semiconductor manufacturing ..."

Gian Antonio Susto et al. (2013)

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DOI: 10.1109/ETFA.2013.6648127

access: closed

type: Conference or Workshop Paper

metadata version: 2021-10-14

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Gian Antonio Susto, Seán F. McLoone, Daniele Pagano, Andrea Schirru, Simone Pampuri, Alessandro Beghi:
Prediction of integral type failures in semiconductor manufacturing through classification methods. ETFA 2013: 1-4

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