"A Generic Surface Micromachining Module for Mems Hermetic Packaging at ..."

Raquel Hellin-Rico et al. (2007)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2022-01-18

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-0711-3317
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  - https://dblp.org/rec/journals/corr/abs-0711-3317
Raquel Hellin-Rico, Jean Pierre Celis, Kris Baert, Chris Van Hoof, Ann Witvrouw:
A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C. CoRR abs/0711.3317 (2007)

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