"A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an ..."

Jinxuan Xie et al. (2025)

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DOI: 10.1109/TIE.2024.3409884

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type: Journal Article

metadata version: 2025-09-16

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Jinxuan Xie, Tong Zhou, Xiaoshi Li, Yu Chen, Tianyu Yang, Yan Su:
A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an Absolute Zero Position Feature. IEEE Trans. Ind. Electron. 72(1): 1054-1064 (2025)

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