Mems presentation
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MEMS (Micro Electro Mechanical Systems) technology involves the miniaturization of mechanical and electro-mechanical elements using microfabrication techniques. The development of MEMS began in 1965 with the invention of a tuner for micro electronic radios, and it continues to evolve through various generations. Future MEMS applications are expected to dominate electronics manufacturing, though challenges remain in foundry access, design, packaging, and standardization.
Mems presentation
- 1. MEMS (Micro Electro Mechanical Systems) BY, S.MICHAEL JOSHUA III Year Mechatronics, PSG Polytechnic College, Coimbatore
- 2. Introduction MEMS (Micro Electro Mechanical Systems) is a technology that in its most general form can be defined as miniaturized mechanical and electro mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication.
- 3. Why MEMS MEMS can miniaturize electronics MEMS makes it cost-effective MEMS makes it reliable MEMS opens up new opportunities
- 4. History and Development of MEMS The first MEMS device is invented by an American Electrical Engineer Harvey C. Nathanson in 1965 and he invented a Tuner for Micro Electronic Radios In later the MEMS was developed in step by step process in First generation, Second generation and Third generation
- 5. Flow Chart of MEMS Process Design Fabrication Testing Packaging
- 6. Bulk Micromachining Surface Micromachining LIGA Process Micro Machining Technology in MEMS
- 7. Materials for MEMS Silicon Germanium Gallium Arsenide Quartz Plastics and Polymers Ceramics Metals
- 8. Applications
- 9. Applications
- 10. Applications
- 11. Future MEMS In future, the each and every product based on electronics is manufactured under the MEMS technology The industry challenges is to: Access to Foundries Design, Simulation and Modelling Packaging and Testing Standardization Education and Training
- 12. References MEMS Journal (www.memsjournal.com) www.memsnet.org wikipedia