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Presentation 1 ai ch e ultra pure 030807
- 1. High Purity WaterProductionHigh Purity Water Production Gary L BurgessGary L Burgess March 8, 2007March 8, 2007 [email protected]@gmail.com
- 2. We areall Concerned with WaterWe are all Concerned with Water •• Process SystemsProcess Systems – SteamSteam – CondensateCondensate – Cooling TowerCooling Tower – Chilled WaterChilled Water – Tempered WaterTempered Water – Water Purification SystemsWater Purification Systems – Water Treatment SystemsWater Treatment Systems – Conveying SystemsConveying Systems •• Mechanical SystemsMechanical Systems – PotablePotable – Service or IndustrialService or Industrial – Fire ProtectionFire Protection – Waste Collection and DrainageWaste Collection and Drainage – Compressed Air DryersCompressed Air Dryers – Distribution for All Mechanical and Process SystemsDistribution for All Mechanical and Process Systems
- 3. •• HVACSystems - Air Washers- Air Washers - Humidifiers- Humidifiers - Hot or Chilled Water- Hot or Chilled Water - Steam- Steam •• Civil Systems - Site Collection and Drainage - Sewer Collection and Drainage - Surface Water Control - Crossing or Conveying - Waste Treatment - Water Purification - Water Management - Soil Mechanics - Irrigation •• Structural Systems -- Soil Loading - Soil Vibrations - Concrete - Piers and Docks
- 4. • ElectricalSystems - Cathodic Protection - Grounding Equipment Enclosures - Duct Banks - Icing Condensation - Condensation • Architectural Systems - Collection and Drainage - Moisture Barriers - Reflecting Ponds - Fountains - Roof Systems • Instrumentation Systems - Measurement and Monitoring - Control Systems for All Disciplines - Freeze Protection
- 5. Water Costs $ 1.00to $ 5.00 + per 1000 gallons Sewage Costs $ 0.50 to $ 4.00 + per 1000 gallons Surface Water 35-95°F Seasonal and Variable TOC Well Water 45 - 80°F Relatively Constant Trinity Sands Aquifer, Dallas - TX 140 °F + increasing with depth @ 1o F per 10 ft or about 1o F per year
- 6. ASTM Type E-1withdrawn 1989 Electronic Grade Water – ppb or parts per billion Resistivity, Megohm-cm – 18 (90% of Time) – (18.24 @ 25o C theoretical ) SiO2 (Total) - 5ppb Particles/ml – 2 (Larger than 1 Micron) Microorganisms/ml – 1 Total Organic Carbon - 50 ppb Chloride - 2ppb Potassium - 1ppb Sodium – 1ppb Total Solids - 10 ppb
- 7. Committees for theInternational Technology Roadmap for Semiconductors - (ITRS) 2008 Ultra Pure Water specifications for semiconductor fabs require no critical metal should be greater than 500 parts-per-quadrillion (ppq): Al, As, Ba, Ca, Co, Cu, Cr, Fe, K, Li, Mg, Mn, Na, Ni, Pb, Sn, Ti, and Zn. 500 ppq – for Critical Metals (parts-per-quadrillion)
- 8. Spartanburg, SC -Water Quality Cations mg/l # / yr* Calcium - Ca ++ 6.1 2,673 Magnesium - Mg ++ 0.9 395 Potassium - K+ 1.0 438 Sodium - Na + 2.2 964 Anions Sulfate - S04= 6.6 2,893 Phosphate - P04= 0.6 263 Chloride - CI- 5.0 2,191 Bicarbonate - HCO3- 13.4 5,873 Fluoride - F- 0.8 359 Silica - HSi03- 9.5 4,164 Nitrate - NO3- 0.1 44 Total Organic Carbon 1.0 438 TOC Total Dissolved Solids 47.2 20,695 TDS * @ 100 gpm
- 10. Ultra Pure Water Costsand Cost Factors A. Operating Costs $5.00 to $30.00+/1000 gallons B. Capital Costs $10.00 to $40.00+/gpd C. Major Cost Factors 1. Feed Water Quality • Temperature • Total Dissolved Solids • Colloidal and Suspended Solids • Total Organic Carbon 2. Municipal Water and Sewer Charges 3. System Size 4. Ratio of Polishing System Size to Primary System Size SWAGS from 1980’s
- 12. Pretreatment Unit Processes*typical Unit Process Function Filtration Sand or Multi-Media - Remove Suspended Solids Filtration * (20 to 50 microns) Precoat Filtration - Remove Suspended Solids - Cellulose (1 to 100 microns) - Diatoms and other contaminants - Powdered Ion Exchange Resin Manganese Greensand - Remove Iron, Manganese, Hydrogen Sulfide Electro Media Filtration - Remove Iron, Manganese, Fluorine, Arsenic, (Uranium / Radon)
- 13. Pretreatment Unit Processes– cont. Unit Process Function Filtration - cont Cartridge Filtration* - Remove Suspended Solids (0.5 to 50 micron) Ultrafiltration - Remove Colloidal Material and Particulates (0.005 micron) Carbon Adsorption Activated Carbon* - Remove Organics & Chlorine Oxidation Ozonation, Hydrogen - Control Bacteria / Peroxide Addition, etc. Reduce TOC
- 14. Pretreatment Unit Processes– cont. Unit Process Function Chemical Addition Acid Addition* - Prevent CaCO3 Deposition - Prevent R. O. Membrane Hydrolysis or Deterioration Coagulation / - Destabilize and Flocculation Agglomerate Colloids Chlorination - Control Bacteria - Reduce TOC Sequesterant Addition* - Prevent CaSO4 and CaCO3 Deposition
- 15. Pretreatment Unit Processes– cont. Unit Process Function Ion Exchange Organic Scavenging - Remove Organics (special anion resin) - Remove Colloidal Matter Softening - Remove Hardness – Calcium, Magnesium, Iron Irradiation Ultraviolet Light - Control Bacteria (185 nm) - Reduce TOC (254 nm)
- 16. Primary Treatment Processes– cont. Unit Process Function Ion Exchange Separate Bed* - Remove Organics Mixed Bed 100 ppb +/- Reverse Osmosis* - Remove Colloidal Matter Double Pass RO 100 ppb +/- - 500 ppb +/- TDS Filtration Cartridge Filters - Control Bacteria (0.5 to 0.2 Micron) - Remove Suspended Solids (1 to 20 +/- Micron)
- 17. Primary Treatment Processes UnitProcess Function Oxidation Ultraviolet Light* - Control Bacteria (185 nm) - Reduce TOC (254 nm) - Reduce Ozone (254 nm) Ozonation - Control Bacteria - Reduce TOC
- 18. Polishing Processes (Produce 18.2megohm/cm – 1 ppb TOC Water) Unit Process Function Mixed Bed Ion* - 18 + megohm - cm Oxidation Ultraviolet Light* - Control Bacteria - Reduce TOC - Reduce Ozone Ozonation - Control Bacteria - Reduce TOC Filtration Cartridge* 0.2 /UV /0.05 micron or Better - Control Bacteria Filtration - Reduce Particles
- 19. Pharmaceutical Polishing Processes (Produce2 megohm - cm or 0.5 micro siemens / cm – 5 ppb TOC Water and low bacteria levels) Unit Process Function Distillation* - 2 +/- megohm – cm “or” Single Effect - 0.5 micro siemens / cm Multi Effect - 0.5 micro mhos / cm Evaporators Double Pass RO (does not produce 160 o F + water for hot circulation) Filtration Cartridge* - Control Bacteria 0.22 micron - Reduce Particles or better
- 20. Distribution Process (Function –Supply and Return Water with a Minimal Pickup of Contamination) Design Criteria - Maintain 5 fps + (1.5 m/s) water velocity with no areas of non-flow greater than 2 to 6 pipe diameters Materials of - Pure, non leachable, Construction “sanitary like” plastic pipe generally of Fluoropolymer PVDF, ECTFE, or Fluorocarbon PTFE or PFA or PEEK
- 21. Point of UseProcesses – Polish the Polished for critical systems or water transported over 1000 +/- ft. Typical Processes Service or Disposable Mixed Bed Ion Exchange *Ultraviolet Light Ultrafiltration or *Cartridge Filtration * typical
- 22. Reclaim Processes – Reusewaste water that are superior in quality than the feed water often 0.1 megohm – cm and TOC less than 1 ppm. Economical if water consumption exceeds 35 + gpm, water is limited, or feed water of poor quality. Typical Processes - Organic Scavenging* - Ion Exchange - Ozone* - Ultraviolet Light - Cartridge Filtration*
- 23.
- 24. Cation Ion Exchange PolystyreneDivinylbenzene Bead Containing Fixed Sulfonic Groups & Mobile Hydrogen Ions which “acts” like a Droplet of Sulfuric Acid in which Cations can be “Exchanged”
- 25. Anion Ion Exchange AnionResin Contains Fixed Quaternary Ammonium Groups and Mobile Hydroxyl Ions and Acts Like a Droplet of Sodium Hydroxide
- 26. Mixed Bed IonExchange
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- 30. Ion Exchange ChemistryIonExchange Chemistry
- 31. Osmosis – flowof low concentration to higher concentrationOsmosis – flow of low concentration to higher concentration through semi-permeable membranethrough semi-permeable membrane RO – reverse flow under pressure of water through aRO – reverse flow under pressure of water through a semi- permeable membranesemi- permeable membrane Osmosis Reverse Osmosis
- 32. We only thinkwe know how Reverse Osmosis works - “RO / Reverse Osmosis Theories” • Sourirajan – Preferential Sorption or Repulsion for One of the Components of the Solution • Gregor & - Water between Polymer Molecular Chains, Gregor Interstitial Water, assumes an Ice-Like State. Under Pressure Water Molecules on the Concentrate Join the Ice-Like Configuration and Melt Away at the Product or Other Side. • Lonsdale – Solution Diffusion Process where the Solute and the Solvent Dissolve in the Membrane Material and Diffuse Through the Homogeneous Non-Porous Surface Layer. • Anderson - Like Lonsdale, Selectivity is based on Partition Coefficients of Solutes between Water and Membrane. • Krasen, - Selectivity is based on the Relative Free Energy of the Eisenman Interaction between Water and Membrane Sites. Kamzaroa & McCutchan
- 33. Why you haveto add acid or soften with high CalciumWhy you have to add acid or soften with high Calcium Carbonate feed waters and not with sea water.Carbonate feed waters and not with sea water. Relatively Low Solubility of CaCO3
- 34. Chemical Reaction ProducingWater & GasChemical Reaction Producing Water & Gas and Changing Solubilityand Changing Solubility
- 35. How you canremove alkalinity and reduce CalciumHow you can remove alkalinity and reduce Calcium Carbonate Concentration with Acid AdditionCarbonate Concentration with Acid Addition
- 36. http://www.liqui-cel.com/applications/O2.cfm Membrana-Charlotte 13800 South LakesDrive Charlotte, North Carolina CO2 or O2 Removal Vacuum or Sweep Gas 1ppb CO2 Levels Gas Molecules
- 37. Reverse Osmosis -RO % Recovery = Product Flow Rate / Feed Flow Rate = 60 gpm / 100 gpm = 0.6 or 60 % % Rejection = (Feed TDS – Product TDS) / Feed TDS = (150 ppm – 10ppm) / 150 ppm = 0.93 or 93% Single Stage – Typical with less than 10+/- gpm
- 38. 200 GPM @ 150 ppm @ 96.7% removal efficiency. __ %Rejection =150 ppm – 11.6 ppm / 150 ppm = 0.92 or 92 % % Recovery = (Sum 1st Stage + Sum 2nd Stage) / Feed Flow = ((50 gpm + 50 gpm) + 50 gpm) / 200 gpm = 0.75 or 75 % typical for larger systems
- 39. Spiral Wound FlowPatternSpiral Wound Flow Pattern
- 40. Hollow Fibers –Millions of Small Fibers with Flow from Outside to Center of Hollow Fiber
- 41. Hollow Fibers –Millions of Small Fibers with Flow from Outside to Center of Hollow Fiber Approximate Diameter of Human Hair
- 42. Reverse OsmosisReverse Osmosis ConfigurationConfiguration HollowFiberHollow Fiber - Higher Pressures- Higher Pressures - Less Space- Less Space Spiral WoundSpiral Wound - More Tolerant to Fouling & Cleaning- More Tolerant to Fouling & Cleaning MaterialsMaterials Cellulose AcetateCellulose Acetate - Low Cost, High Pressure, Chlorine- Low Cost, High Pressure, Chlorine Tolerant, narrow pH range 4- 6Tolerant, narrow pH range 4- 6 PolyamidePolyamide - High Cost, Lower Operating- High Cost, Lower Operating Pressure,Pressure, Broad pH Range 3 – 11Broad pH Range 3 – 11 Operating PressuresOperating Pressures Low PressureLow Pressure - 50 to 150 psig- 50 to 150 psig - Lower Percent Ion Rejection- Lower Percent Ion Rejection High PressureHigh Pressure - 350 psig – 450 psig- 350 psig – 450 psig - Higher Percent Ion Rejection- Higher Percent Ion Rejection
- 43. Reverse Osmosis Problemsand SolutionsReverse Osmosis Problems and Solutions
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- 45. ED Electro dialysisIon FlowED Electro dialysis Ion Flow
- 46. Electro dialysis –Electrically removing IonsElectro dialysis – Electrically removing Ions
- 47. ED Reversal willPeriodically Switch ChargeED Reversal will Periodically Switch Charge and Corresponding Flow Pathsand Corresponding Flow Paths
- 48. ED – ContinuousDeionization with no ChemicalsED – Continuous Deionization with no Chemicals Feed Water RequirementsFeed Water Requirements
- 49. Relative Cost ofPiping MaterialsRelative Cost of Piping Materials
- 50. PVC Pipe –Not really smooth and source ofPVC Pipe – Not really smooth and source of collectingcollecting Bacteria and ContaminationBacteria and Contamination
- 51. PVC “Glue” –Solvent Weld JointPVC “Glue” – Solvent Weld Joint Perfect Home for BacteriaPerfect Home for Bacteria
- 52.
- 53. Some of theSystems Designed – Gary Burgess
- 54. Plant Utilities Engineerat World’s Largest Silicon Wafer Plant and Troubleshooting
- 55. Seeing is Believing– I hope you see Water Differently Now. Designed Newport News Ship Building’s Grade A Nuclear Water System to Refurbish our CVN Carriers
- 56. There are multipleways to Produce Pure Water - always be sure you have good Pretreatment or you will ultimately have Polishing Problems.
- 57. Url of thispage: http://www.niroinc.com/html/filtration/ftechnology.html Illustration courtesy of Niro, Columbia, MD / Hudson, WI
- 58. http://www.wrtnet.com/popup/literature.php?acc=2&id=8 Water Remediation Technology, LLC. 9500W. 49th Avenue, Suite D100 Wheat Ridge, Colorado 80033 (303) 424-5355 Uranium Trend
- 59. http://www.wrtnet.com/popup/literature.php?acc=2&id=8 Water Remediation Technology,LLC. 9500 W. 49th Avenue, Suite D100 Wheat Ridge, Colorado 80033 (303) 424-5355