Recent Advances in Nanofabrication Techniques and Applications

Bo Cui

doi:10.5772/859

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Recent Advances in Nanofabrication Techniques and Applications

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Recent Advances in Nanofabrication Techniques and Applications

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Academic Editor

Bo Cui

University of Waterloo,
Canada

Published 02 December 2011

Doi 10.5772/859

ISBN 978-953-307-602-7

eBook (PDF) ISBN 978-953-51-5554-6

Number of pages 628

Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered,...

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Edited Volume and chapters are indexed in

1. Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch

By Sumio Hosaka

3,771

2. Focused Ion Beam Lithography

By Heinz D. Wanzenboeck and Simon Waid

11,066

3. Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

By Jianwu Zhang, Zhongping Wang and Zengming Zhang

3,579

4. Character Projection Lithography for Application-Specific Integrated Circuits

By Makoto Sugihara

2,806

5. Transform-Based Lossless Image Compression Algorithm for Electron Beam Direct Write Lithography Systems

By Jeehong Yang and Serap A. Savari

2,861

6. Ultrafast Fabrication of Metal Nanostructures Using Pulsed Laser Melting

By Bo Cui

3,765

7. Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale

By Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

4,783

8. Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition

By Makoto Okada and Shinji Matsui

3,329

9. Improving the Light-Emitting Efficiency of GaN LEDs Using Nanoimprint Lithography

By Yeeu-Chang Lee and Sheng-Han Tu

7,989

10. Fabrication of Circular Grating Distributed Feedback Dye Laser by Nanoimprint Lithography

By Yan Chen, Zhenyu Li, Zhaoyu Zhang and Axel Scherer

3,757

11. Application of Nanoimprint Lithography to Distributed Feedback Laser Diodes

By Masaki Yanagisawa

3,720

12. Guided-Mode Resonance Filters Fabricated with Soft Lithography

By Kyu J. Lee, Jungho Jin, Byeong-Soo Bae and Robert Magnusson

3,745

13. DUV Interferometry for Micro and Nanopatterned Surfaces

By Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

3,135

14. Ultrashort Pulsed Lasers – Efficient Tools for Materials Micro-Processing

By Marian Zamfirescu, Magdalena Ulmeanu, Alina Bunea, Gheorghe Sajin and Razvan Dabu

3,779

15. Laser-Based Lithography for Polymeric Nanocomposite Structures

By Athanassia Athanassiou, Despina Fragouli, Francesca Villafiorita Monteleone, Athanasios Milionis, Fabrizio Spano, Ilker Bayer and Roberto Cingolani

3,969

16. Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography

By Mitsuhiro Horade and Susumu Sugiyama

3,386

17. Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

By Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng

3,154

18. Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target

By Sho Amano

3,233

19. Irradiation Effects on EUV Nanolithography Collector Mirrors

By J.P. Allain

3,874

20. High-Index Immersion Lithography

By Keita Sakai

3,738

21. Double Patterning for Memory ICs

By Christoph Ludwig and Steffen Meyer

6,355

22. Diffraction Based Overlay Metrology for Double Patterning Technologies

By Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

6,525

23. Nanolithography Study Using Scanning Probe Microscope

By S. Sadegh Hassani and H. R. Aghabozorg

3,508

24. Scanning Probe Lithography on Organic Monolayers

By SunHyung Lee, Takahiro Ishizaki, Katsuya Teshima, Nagahiro Saito and Osamu Takai

3,044

25. Controlled Fabrication of Noble Metal Nanomaterials via Nanosphere Lithography and Their Optical Properties

By Yujun Song

3,312

26. A Feasible Routine for Large-Scale Nanopatterning via Nanosphere Lithography

By Zhenyang Zhong, Tong Zhou, Yiwei Sun and Jie Lin

3,695

27. Electrohydrodynamic Inkjet – Micro Pattern Fabrication for Printed Electronics Applications

By Kyung-Hyun Choi, Khalid Rahman, Nauman Malik Muhammad, Arshad Khan, Ki-Rin Kwon, Yang-Hoi Doh and Hyung-Chan Kim

7,205

28. Lithography-Free Nanostructure Fabrication Techniques Utilizing Thin-Film Edges

By Hideo Kaiju, Kenji Kondo and Akira Ishibashi

2,814

29. Extremely Wetting Pattern by Photocatalytic Lithography and Its Application

By Yuekun Lai, Changjian Lin and Zhong Chen

3,828

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123,723 Total Chapter Downloads

3,676 Total Chapter Views

58 Crossref Citations

133 Dimensions Citations

14 Altmetric Score

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